UCI'S MICROTECHNOLOGY & MANUFACTURING LABORATORY

The Microtechnology and Manufacturing Laboratory at the University of California, Irvine (UCI MML) is housed in the Engineering Gateway Building. The MML cleanroom occupies a total floor space of approximately 10,000 sq. ft. with an area of approximately 8,000 sq. ft. under HEPA filtration (Class 100 for the photolithography, Class 1000 for the fabrication and processing, and Class 10,000 for the sample preparation and measurement). The MML is equipped to support research and development, prototyping, and small-scale manufacturing in the areas of

• silicon and compound semiconductor microelectronic devices,
• silicon micromachining, and
• microscale fabrication.

For additional information contact:

Richard Nelson
Department of Electrical & Computer Engineering
2225 Engineering Gateway
University of California, Irvine
Irvine, CA 92697-2625


(714) 824-4107
rnelson@uci.edu

MML Equipment List
Projects Underway